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E-Beam Deposition System
Location: Clean room
The E-beam evaporation system is an ultra-high vacuum deposition system.
It consists of an MBE-Komponenten Multi Pocket Electron Beam Evaporator with 4 pockets, a hearth capacity 8 cm³ each, and a maximum power of 5kW. It has a 4” in diameter rotating substrate holder with a heating stage of 800°C and QCM to monitor the thin film growth and thickness.
It is used for the precise deposition of metal thin films.
Magnetron Sputtering HEX
Location: Deposition LabHow to access
To access our facilities, please email royce@imperial.ac.uk.
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